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The following keynote lecture will be presented at 17th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials, 18th International Conference on Plasma-Nano Technology & Science (ISPlasma2025/IC-PLANTS2025) , to be held in Aichi, Japan.

  • 2024-11-13
Our Tech

The following three of our latest technologies will be presented ‘SPIE Advanced Lithography + Patterning 2024’ in the United States.

  • 2024-02-22
Our Tech

The following two of our latest technologies will be presented ‘SPIE Advanced Lithography + Patterning’ in the United States.

  • 2023-02-21
Our Tech

Three papers were published in the Journal of Vacuum Science &Technology

  • 2022-11-15
Our Tech

PeS 2020 e-Beam System® has passed 1000 hrs during a continuous running test!

  • 2021-04-16

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