PES-2020 e-Beam System®
for Semiconductor Inspection Tools

  1. 【Features】

【Standard specification】
Accelerating voltage: Tunable up to -50 kV
Beam current: 200 uA (max.)
Dimensions: 821 mm x 722 mm x 562 mm (H x W x D)
Weight: 140 kg
Laser class:class 4
Safety requirement:SEMI S2 certified