the electron beam has been essential for semiconductor manufacturing tasks, such as inspection and mask writing.
However, the technology has not changed over almost 50 years.Its history can be traced back to the thermal emitter of the 1940s.In the 1970s, the high performance field emitter was developed.
However, as technological innovations in the semiconductor industry accelerated much faster than expected, the requirement for further performance improvement of the electron beam also increased significantly.
We, Photo electron Soul Inc.,
provide solutions for performance improvement based on semiconductor photocathode technology.