PES-2020 e-Beam System®
for Semiconductor Inspection Tools
for Semiconductor Inspection Tools
- 【Features】
- Much brighter beam compared to Schottky e-beam(>×10)measurement data
- The world's first Digital Selective e-Beaming™ (DSeB)test example
- Multi and Deformable e-beamconcept figure
- Ideal production worthinesscontinuous test result
【Standard specification】
Accelerating voltage: Tunable up to -50 kV
Beam current: 200 uA (max.)
Dimensions: 821 mm x 722 mm x 562 mm (H x W x D)
Weight: 140 kg
Laser class：class 4
Safety requirement：SEMI S2 certified
Accelerating voltage: Tunable up to -50 kV
Beam current: 200 uA (max.)
Dimensions: 821 mm x 722 mm x 562 mm (H x W x D)
Weight: 140 kg
Laser class：class 4
Safety requirement：SEMI S2 certified
PES-2020 e-Beam System® installed into the EBI