We will present our latest research at the 14th Nano Testing Symposium,
to be held on November 11–13, 2025 at the Senri Life Science Center, Osaka, JAPAN.
The 45th Annual NANO Testing Symposium (NANOTS2025)
November 11 (Tue) – 13 (Thu), 2025
Senri Life Science Center, Osaka, Japan
(Organized by The Institute of NANO Testing)
•Session: Metrology and Inspection III
•Date & Time: November 12, 15:36–16:01
•Title: GaN Photoelectron Beam-Enabled In-situ SEM Observation of MOSFET Local Electrical Actuation
•Presenters: Tomohiro Nishitani, et al., (Photo electron Soul Inc. / Nagoya University)